101-GHz InAlN/GaN HEMTs on silicon with high Johnson's figure-of-merit

CW Tsou, CY Lin, YW Lian… - IEEE Transactions on …, 2015 - ieeexplore.ieee.org
In this brief, the InAlN/GaN high-electron mobility transistors (HEMTs) on silicon substrate
with high Johnson's figure-of-merit (J-FOM) are presented. A trilayer photoresist of …

High-Mobility Normally OFF Al2O3/AlGaN/GaN MISFET With Damage-Free Recessed-Gate Structure

J Zhang, L He, L Li, Y Ni, T Que, Z Liu… - IEEE Electron …, 2018 - ieeexplore.ieee.org
In this letter, partial recessed-gate Al 2 O 3/AlGaN/GaN MISFET is experimentally
demonstrated based on selective-area growth. The device features different contents of Al in …

Atomic layer etching technique for InAlN/GaN heterostructure with AlN etch-stop layer

F Du, Y Jiang, Z Qiao, Z Wu, C Tang, J He… - Materials Science in …, 2022 - Elsevier
An atomic layer etching (ALE) technique for InAlN/AlN/GaN structure was investigated for the
first time. Different recipes with O 2 modification times of 30–180 s and BCl 3 removal RF …

High Threshold Voltage Uniformity and Low Hysteresis Recessed-Gate Al2O3/AlN/GaN MISFET by Selective Area Growth

L He, F Yang, L Li, Z Chen, Z Shen… - … on Electron Devices, 2017 - ieeexplore.ieee.org
In this paper, a normally off Al 2 O 3/AlN/GaN MISFET on Si substrate for achieving high
threshold voltage stability and uniformity is obtained based on selective area growth. A thin …

The Atomic Layer Etching Technique with Surface Treatment Function for InAlN/GaN Heterostructure

F Du, Y Jiang, Z Wu, H Lu, J He, C Tang, Q Hu, K Wen… - Crystals, 2022 - mdpi.com
This paper studied an atomic layer etching (ALE) technique with a surface treatment function
for InAlN/GaN heterostructures with AlN spacer layers. Various parameters were attempted …

Device characteristics and performance estimation of nearly lattice-matched InAlN/AlGaN heterostructure field-effect transistors

M Miyoshi, T Tsutsumi, G Nishino, Y Miyachi… - Journal of Vacuum …, 2016 - pubs.aip.org
A nearly lattice-matched In 0.12 Al 0.88 N/Al 0.21 Ga 0.79 N heterostructure field-effect
transistor (HFET) was fabricated and its device characteristics were evaluated. The …

InAlN/GaN and AlGaN/GaN HEMT technologies comparison for microwave applications

LE Velikovskiy, PE Sim, OI Demchenko… - IOP Conference …, 2021 - iopscience.iop.org
High electron mobility transistors (HEMTs) technologies based on AlGaN/GaN and
InAlN/GaN heterostructures have been developed. The research focused on influence of …

Dynamic variation of carrier transport properties of recessed Au-free ohmic contacts to InAlN/AlN/GaN on Si-wafer

T Yoshida, T Egawa - Japanese Journal of Applied Physics, 2018 - iopscience.iop.org
The temperature dependence of specific contact resistivity of recessed ohmic contacts was
investigated to examine the carrier conduction mechanism in Ti/Al/W ohmic contacts on …

Improved mobility in InAlN/AlGaN two-dimensional electron gas heterostructures with an atomically smooth heterointerface

D Hosomi, Y Miyachi, T Egawa… - Japanese Journal of …, 2018 - iopscience.iop.org
We attempted to improve the mobility of InAlN/AlGaN two-dimensional electron gas (2DEG)
heterostructures by achieving an atomically smooth heterointerface in metalorganic …

A balancing method for low Ron and high Vth normally-off GaN MISFET by preserving a damage-free thin AlGaN barrier layer

J Zhang, L He, L Li, Y Ni, T Que, Z Liu… - 2018 IEEE 30th …, 2018 - ieeexplore.ieee.org
Partially AlGaN recessed scheme based on selective area growth was experimentally
demonstrated to improve the performance of normally-off GaN MISFET. The damage-free …