Recent developments in surface science and engineering, thin films, nanoscience, biomaterials, plasma science, and vacuum technology

M Mozetič, A Vesel, G Primc, C Eisenmenger-Sittner… - Thin Solid Films, 2018 - Elsevier
Nanometer-sized structures, surfaces and sub-surface phenomena have played an
enormous role in science and technological applications and represent a driving-force of …

Helium metastable species generation in atmospheric pressure RF plasma jets driven by tailored voltage waveforms in mixtures of He and N2

I Korolov, M Leimkühler, M Boeke… - Journal of Physics D …, 2020 - iopscience.iop.org
Spatially resolved tunable diode-laser absorption measurements of the absolute densities of
He-I (2 3 S 1) metastables in a micro atmospheric pressure plasma jet operated in He/N 2 …

Electron bounce-cyclotron resonance in capacitive discharges at low magnetic fields

S Patil, S Sharma, S Sengupta, A Sen… - Physical Review …, 2022 - APS
We report the existence of an enhanced operating regime for a high-frequency, low-
pressure capacitively coupled plasma (CCP) discharge in the presence of a weak magnetic …

Direct implicit and explicit energy-conserving particle-in-cell methods for modeling of capacitively coupled plasma devices

H Sun, S Banerjee, S Sharma, AT Powis… - Physics of …, 2023 - pubs.aip.org
Achieving large-scale kinetic modeling is a crucial task for the development and optimization
of modern plasma devices. With the trend of decreasing pressure in applications, such as …

[HTML][HTML] Investigating the effects of electron bounce-cyclotron resonance on plasma dynamics in capacitive discharges operated in the presence of a weak transverse …

S Sharma, S Patil, S Sengupta, A Sen, A Khrabrov… - Physics of …, 2022 - pubs.aip.org
Recently, Patil et al.[Phys. Rev. Res. 4, 013059 (2022)] have reported the existence of an
enhanced operating regime when a low-pressure (5 mTorr) capacitively coupled discharge …

Voltage waveform tailoring in radio frequency plasmas for surface charge neutralization inside etch trenches

F Krüger, S Wilczek, T Mussenbrock… - … Sources Science and …, 2019 - iopscience.iop.org
The etching of sub micrometer high-aspect-ratio (HAR) features into dielectric materials in
low pressure radio frequency technological plasmas is limited by the accumulation of …

Chemical kinetics and density measurements of OH in an atmospheric pressure He+ O2+ H2O radiofrequency plasma

A Brisset, AR Gibson, S Schröter, K Niemi… - Journal of Physics D …, 2021 - iopscience.iop.org
This work presents experiments and modelling of OH densities in a radio-frequency driven
atmospheric-pressure plasma in a plane-parallel geometry, operated in helium with small …

Control of electron dynamics, radical and metastable species generation in atmospheric pressure RF plasma jets by Voltage Waveform Tailoring

I Korolov, Z Donko, G Hübner, L Bischoff… - Plasma Sources …, 2019 - iopscience.iop.org
Atmospheric pressure capacitively coupled radio frequency discharges operated in He/N 2
mixtures and driven by tailored voltage waveforms are investigated experimentally using a …

Magnetical asymmetric effect in geometrically and electrically symmetric capacitively coupled plasma

S Yang, Y Zhang, H Wang, J Cui… - Plasma Processes and …, 2017 - Wiley Online Library
Magnetical asymmetric effect (MAE) in a geometrically and electrically symmetric
capacitively coupled plasma is investigated by a one‐dimensional implicit Particle‐in …

Control of ion flux-energy distributions by low frequency square-shaped tailored voltage waveforms in capacitively coupled plasmas

P Hartmann, I Korolov, J Escandón-López… - Plasma Sources …, 2022 - iopscience.iop.org
Capacitively coupled plasmas are routinely used in an increasing number of technological
applications, where a precise control of the quantity and the shape of the energy distribution …