Recent developments in surface science and engineering, thin films, nanoscience, biomaterials, plasma science, and vacuum technology
Nanometer-sized structures, surfaces and sub-surface phenomena have played an
enormous role in science and technological applications and represent a driving-force of …
enormous role in science and technological applications and represent a driving-force of …
Helium metastable species generation in atmospheric pressure RF plasma jets driven by tailored voltage waveforms in mixtures of He and N2
Spatially resolved tunable diode-laser absorption measurements of the absolute densities of
He-I (2 3 S 1) metastables in a micro atmospheric pressure plasma jet operated in He/N 2 …
He-I (2 3 S 1) metastables in a micro atmospheric pressure plasma jet operated in He/N 2 …
Electron bounce-cyclotron resonance in capacitive discharges at low magnetic fields
S Patil, S Sharma, S Sengupta, A Sen… - Physical Review …, 2022 - APS
We report the existence of an enhanced operating regime for a high-frequency, low-
pressure capacitively coupled plasma (CCP) discharge in the presence of a weak magnetic …
pressure capacitively coupled plasma (CCP) discharge in the presence of a weak magnetic …
Direct implicit and explicit energy-conserving particle-in-cell methods for modeling of capacitively coupled plasma devices
Achieving large-scale kinetic modeling is a crucial task for the development and optimization
of modern plasma devices. With the trend of decreasing pressure in applications, such as …
of modern plasma devices. With the trend of decreasing pressure in applications, such as …
[HTML][HTML] Investigating the effects of electron bounce-cyclotron resonance on plasma dynamics in capacitive discharges operated in the presence of a weak transverse …
S Sharma, S Patil, S Sengupta, A Sen, A Khrabrov… - Physics of …, 2022 - pubs.aip.org
Recently, Patil et al.[Phys. Rev. Res. 4, 013059 (2022)] have reported the existence of an
enhanced operating regime when a low-pressure (5 mTorr) capacitively coupled discharge …
enhanced operating regime when a low-pressure (5 mTorr) capacitively coupled discharge …
Voltage waveform tailoring in radio frequency plasmas for surface charge neutralization inside etch trenches
The etching of sub micrometer high-aspect-ratio (HAR) features into dielectric materials in
low pressure radio frequency technological plasmas is limited by the accumulation of …
low pressure radio frequency technological plasmas is limited by the accumulation of …
Chemical kinetics and density measurements of OH in an atmospheric pressure He+ O2+ H2O radiofrequency plasma
A Brisset, AR Gibson, S Schröter, K Niemi… - Journal of Physics D …, 2021 - iopscience.iop.org
This work presents experiments and modelling of OH densities in a radio-frequency driven
atmospheric-pressure plasma in a plane-parallel geometry, operated in helium with small …
atmospheric-pressure plasma in a plane-parallel geometry, operated in helium with small …
Control of electron dynamics, radical and metastable species generation in atmospheric pressure RF plasma jets by Voltage Waveform Tailoring
Atmospheric pressure capacitively coupled radio frequency discharges operated in He/N 2
mixtures and driven by tailored voltage waveforms are investigated experimentally using a …
mixtures and driven by tailored voltage waveforms are investigated experimentally using a …
Magnetical asymmetric effect in geometrically and electrically symmetric capacitively coupled plasma
S Yang, Y Zhang, H Wang, J Cui… - Plasma Processes and …, 2017 - Wiley Online Library
Magnetical asymmetric effect (MAE) in a geometrically and electrically symmetric
capacitively coupled plasma is investigated by a one‐dimensional implicit Particle‐in …
capacitively coupled plasma is investigated by a one‐dimensional implicit Particle‐in …
Control of ion flux-energy distributions by low frequency square-shaped tailored voltage waveforms in capacitively coupled plasmas
P Hartmann, I Korolov, J Escandón-López… - Plasma Sources …, 2022 - iopscience.iop.org
Capacitively coupled plasmas are routinely used in an increasing number of technological
applications, where a precise control of the quantity and the shape of the energy distribution …
applications, where a precise control of the quantity and the shape of the energy distribution …