Over the last two decades, piezoelectric resonant sensors based on micro-
electromechanical systems (MEMS) technologies have been extensively studied as such …

Over the past several decades, the technology of micro-electromechanical system (MEMS)
has advanced. A clear need of miniaturization and integration of electronics components …

In this paper, we analyze possible sources of dissipation in aluminium nitride (AlN) contour
mode resonators for three different resonance frequency devices (fr)(220 MHz, 370 MHz …

The explosive development of wireless and mobile communication systems has
continuously driven rapid technology innovation in component performance and system …

This paper presents a new class of monolithic integrated RF passive components based on
the recently developed aluminum nitride (AlN) MEMS cross-sectional Lamé-mode resonator …

Formation of allowed and stopped frequency bands of elastic wave propagation in the
periodic media, also known as phononic crystal (PnC), recently has attracted great attention …

This paper reports on the analysis and removal of transverse spurious modes in shear
horizontal (SH0) mode lithium niobate (LiNbO 3) laterally vibrating resonators (LVRs). A …

This paper experimentally verifies the impact of thermoelastic damping (TED) in metal
electrodes on the quality factor (Q ted) of 1 GHz Aluminum Nitride (AlN) contour mode …

Thin-film piezoelectric-on-silicon (TPoS) microelectromechanical (MEMS) resonators are
required to have high Q-factor to offer satisfactory results in their application areas, such as …

This work presents a novel ultra-high frequency Lamb mode Aluminum nitride piezoelectric
resonator with enhanced quality factors (Q). With slots introduced in the vicinity of the tether …