Thin film design of amorphous hafnium oxide nanocomposites enabling strong interfacial resistive switching uniformity

M Hellenbrand, B Bakhit, H Dou, M Xiao, MO Hill… - Science …, 2023 - science.org
A design concept of phase-separated amorphous nanocomposite thin films is presented that
realizes interfacial resistive switching (RS) in hafnium-oxide-based devices. The films are …

The Characterization and Passivation of Fixed Oxide Charges and Interface States in the MOS System

PK Hurley, É O'Connor, V Djara… - … on Device and …, 2013 - ieeexplore.ieee.org
In this paper, we present a review of experimental results examining charged defect
components in the Al 2 O 3/In 0.53 Ga 0.47 As metal-oxide-semiconductor (MOS) system …

Temperature and frequency dependent electrical characterization of HfO2/InxGa1− xAs interfaces using capacitance-voltage and conductance methods

É O'Connor, S Monaghan, RD Long… - Applied Physics …, 2009 - pubs.aip.org
Electrical properties of metal-oxide-semiconductor capacitors using atomic layer deposited
HfO 2 on n-type GaAs or In x Ga 1− x As (x= 0.53, 0.30, 0.15) epitaxial layers were …

Probing Interface Defects in Top-Gated MoS2 Transistors with Impedance Spectroscopy

P Zhao, A Azcatl, YY Gomeniuk… - … applied materials & …, 2017 - ACS Publications
The electronic properties of the HfO2/MoS2 interface were investigated using multifrequency
capacitance–voltage (C–V) and current–voltage characterization of top-gated MoS2 metal …

Electrical, structural, and chemical properties of HfO2 films formed by electron beam evaporation

K Cherkaoui, S Monaghan, MA Negara… - Journal of Applied …, 2008 - pubs.aip.org
High dielectric constant hafnium oxide films were formed by electron beam (e-beam)
evaporation on HF last terminated silicon (100) wafers. We report on the influence of low …

XPS study of the bonding properties of lanthanum oxide/silicon interface with a trace amount of nitrogen incorporation

H Wong, H Iwai, K Kakushima, BL Yang… - Journal of the …, 2009 - iopscience.iop.org
Recently, both electrical and material properties of lanthanum oxide have been found to
significantly improve with a trace amount of nitrogen doping. This work conducted a detailed …

Structural and electrical analysis of the atomic layer deposition of HfO2/n-In0. 53Ga0. 47As capacitors with and without an Al2O3 interface control layer

A O'Mahony, S Monaghan, G Provenzano… - Applied Physics …, 2010 - pubs.aip.org
High mobility III-V substrates with high-k oxides are required for device scaling without loss
of channel mobility. Interest has focused on the self-cleaning effect on selected III-V …

Observation of peripheral charge induced low frequency capacitance-voltage behaviour in metal-oxide-semiconductor capacitors on Si and GaAs substrates

É O'Connor, K Cherkaoui, S Monaghan… - Journal of Applied …, 2012 - pubs.aip.org
We report on experimental observations of room temperature low frequency capacitance-
voltage (CV) behaviour in metal oxide semiconductor (MOS) capacitors incorporating high …

Decreasing Interface Defect Densities via Silicon Oxide Passivation at Temperatures Below 450° C

ZJ Rad, JP Lehtio, I Mack, K Rosta… - … Applied Materials & …, 2020 - ACS Publications
Low-temperature (LT) passivation methods (< 450° C) for decreasing defect densities in the
material combination of silica (SiO x) and silicon (Si) are relevant to develop diverse …

Electrical analysis of three-stage passivated In0. 53Ga0. 47As capacitors with varying HfO2 thicknesses and incorporating an Al2O3 interface control layer

S Monaghan, A O'Mahony, K Cherkaoui… - Journal of Vacuum …, 2011 - pubs.aip.org
The atomic layer deposition of high dielectric constant oxides like HfO 2 on III-V substrates
such as In 0.53 Ga 0.47 As leads to a poor interface, with the growth of In 0.53 Ga 0.47 As …