Similarity theory and scaling laws for low-temperature plasma discharges: A comprehensive review

Y Fu, H Wang, X Wang - Reviews of Modern Plasma Physics, 2023 - Springer
Similarity theory and scaling laws determine how physical laws remain the same when
control parameters are changed, which is essential for the correlation, prediction, and …

[HTML][HTML] Transitions between electron emission and gas breakdown mechanisms across length and pressure scales

AL Garner, G Meng, Y Fu, AM Loveless… - Journal of Applied …, 2020 - pubs.aip.org
This Perspective outlines theoretical, simulation, and experimental studies linking electron
emission and gas breakdown. Many studies have investigated field emission-driven …

eduPIC: an introductory particle based code for radio-frequency plasma simulation

Z Donkó, A Derzsi, M Vass, B Horváth… - Plasma Sources …, 2021 - iopscience.iop.org
Particle based simulations are indispensable tools for numerical studies of charged particle
swarms and low-temperature plasma sources. The main advantage of such approaches is …

On the importance of excited state species in low pressure capacitively coupled plasma argon discharges

DQ Wen, J Krek, JT Gudmundsson… - Plasma Sources …, 2023 - iopscience.iop.org
In the past three decades, first principles-based fully kinetic particle-in-cell Monte Carlo
collision (PIC/MCC) simulations have been proven to be an important tool for the …

Electron dynamics in radio frequency magnetron sputtering argon discharges with a dielectric target

B Zheng, Y Fu, K Wang, T Schuelke… - … Sources Science and …, 2021 - iopscience.iop.org
We demonstrate a self-consistent and complete description of electron dynamics in a typical
electropositive radio frequency magnetron sputtering (RFMS) argon discharge with a …

Scale-invariant resonance characteristics in magnetized capacitive radio frequency plasmas

D Yang, H Wang, B Zheng, X Zou, X Wang, Y Fu - Physics of Plasmas, 2023 - pubs.aip.org
Resonance mechanisms have been found to be essential for the generation of high-density
rf plasmas at low pressures, in which electrons can be continuously accelerated through …

2D particle-in-cell simulations of geometrically asymmetric low-pressure capacitive RF plasmas driven by tailored voltage waveforms

L Wang, P Hartmann, Z Donko, YH Song… - … Sources Science and …, 2021 - iopscience.iop.org
The effects of the simultaneous presence of two different types of plasma asymmetry, viz,
geometric and electrical, on low-pressure capacitively coupled argon discharges are studied …

Similarity law and frequency scaling in low-pressure capacitive radio frequency plasmas

Y Fu, B Zheng, DQ Wen, P Zhang, QH Fan… - Applied Physics …, 2020 - pubs.aip.org
We verify the similarity law (SL) and show a violation of frequency scaling (f-scaling) in low-
pressure capacitive radio frequency (rf) plasmas via fully kinetic particle-in-cell simulations …

Generalizing similarity laws for radio-frequency discharge plasmas across nonlinear transition regimes

Y Fu, H Wang, B Zheng, P Zhang, QH Fan, X Wang… - Physical Review …, 2021 - APS
We generalize similarity theory based on the scaling and solution invariance of the
Boltzmann equation, coupled with the Poisson equation, and demonstrate similarity laws for …

[HTML][HTML] An empirical relationship for ionization coefficient for microscale gaps and high reduced electric fields

H Wang, A Venkattraman, AM Loveless… - Journal of Applied …, 2022 - pubs.aip.org
The importance of gas discharges for numerous applications with increasingly small device
size motivates a more fundamental understanding of breakdown mechanisms. Gas …