Titanium alloys are high-quality materials for aerospace parts with good thermal mechanical
properties. Fatigue failure has been the most prominent problem, so surface strengthening …

In the last decade, research has focused on fabricating new materials to accelerate the
development of energy storage devices. In this work, metal-electrolyte-metal (Au-YSZ-Ru) …

Vanadium dioxide (VO2) thin films of different thicknesses were prepared by regulating the
deposition time (2, 2.5, 3, and 3.5 h). The impact of deposition time on the microstructure …

This work demonstrates a hybrid MEMS actuator platform that combines electrostatic and
piezoelectric actuators to displace a suspended MEMS platform along 3 degrees-of-freedom …

This paper presents a comprehensive review of the design and implementation methods of
low-power piezoelectric energy harvesting circuits, which in the last few years have gained …

For an optimized performance of micro electromechanical systems (MEMS) double-clamped
bridge-type resonators for mechanical strain sensing, a modified sputter process was …

Residual stress in electroplated hard magnetic layers is crucial to the stability and durability
in end applications. We electrodeposited highly HCP (002) textured CoMnP hard magnetic …

Light detection and ranging (LiDAR) devices based on micro-electromechanical systems
(MEMS) micromirrors have been promising sensors for automatic driving due to the …

Over the past three decades, silicon photonic devices have been core to the realization of
large‐scale photonic‐integrated circuits. However, silicon nitride is another key …

Currently, the most advanced micromachined microphones on the market are based on a
capacitive coupling principle. Capacitive micro-electromechanical-system-based (MEMS) …