Capacitive RF MEMS switch dielectric charging and reliability: a critical review with recommendations
WM Van Spengen - Journal of Micromechanics and …, 2012 - iopscience.iop.org
This paper presents a comprehensive review of the reliability issues hampering capacitive
RF MEMS switches in their development toward commercialization. Dielectric charging and …
RF MEMS switches in their development toward commercialization. Dielectric charging and …
Research and analysis of MEMS switches in different frequency bands
W Tian, P Li, LX Yuan - Micromachines, 2018 - mdpi.com
Due to their high isolation, low insertion loss, high linearity, and low power consumption,
microelectromechanical systems (MEMS) switches have drawn much attention from …
microelectromechanical systems (MEMS) switches have drawn much attention from …
Charging in dielectricless capacitive RF-MEMS switches
D Mardivirin, A Pothier, A Crunteanu… - IEEE transactions on …, 2008 - ieeexplore.ieee.org
This paper presents results on high lifetime RF microelectromechanical (RF-MEMS)
dielectricless capacitive switches. Using air gap variation only, these RF MEMS capacitive …
dielectricless capacitive switches. Using air gap variation only, these RF MEMS capacitive …
Dielectric charging in silicon nitride films for MEMS capacitive switches: Effect of film thickness and deposition conditions
The paper presents a systematic investigation of the dielectric charging and discharging
process in silicon nitride thin films for RF-MEMS capacitive switches. The SiN films were …
process in silicon nitride thin films for RF-MEMS capacitive switches. The SiN films were …
Dielectric engineering of nanostructured layers to control the transport of injected charges in thin dielectrics
K Makasheva, C Villeneuve-Faure… - IEEE Transactions …, 2016 - ieeexplore.ieee.org
A new concept concerning dielectric engineering is presented in this study aiming at a net
improvement of the performance of dielectric layers in RF MEMS capacitive switches with …
improvement of the performance of dielectric layers in RF MEMS capacitive switches with …
Capacitive RF MEMS switches with tantalum-based materials
In this paper, shunt capacitive RF microelectromechanical systems (MEMS) switches are
developed in III-V technology using tantalum nitride (TaN) and tantalum pentoxide (Ta 2 O 5) …
developed in III-V technology using tantalum nitride (TaN) and tantalum pentoxide (Ta 2 O 5) …
Voltage and temperature effect on dielectric charging for RF-MEMS capacitive switches reliability investigation
In this paper, we study the effect of stress voltage and temperature on the dielectric charging
and discharging processes of silicon nitride thin films used in RF-MEMS capacitive switches …
and discharging processes of silicon nitride thin films used in RF-MEMS capacitive switches …
Reliability issue related to dielectric charging in capacitive micromachined ultrasonic transducers: A review
The long-term reliability of MEMS devices related to the dielectric charging phenomenon is
one of the main hurdles in the commercialization of these devices. This paper presents a …
one of the main hurdles in the commercialization of these devices. This paper presents a …
Model and observations of dielectric charge in thermally oxidized silicon resonators
This paper investigates the effects of dielectric charge on resonant frequency in thermally
oxidized silicon resonators hermetically encapsulated using¿ epi-seal.¿ SiO 2 coatings are …
oxidized silicon resonators hermetically encapsulated using¿ epi-seal.¿ SiO 2 coatings are …
On the influence of environment gases, relative humidity and gas purification on dielectric charging/discharging processes in electrostatically driven MEMS/NEMS …
In this paper, we investigate the impact of environment gases and relative humidity on
dielectric charging phenomenon in electrostatically actuated micro-and nano …
dielectric charging phenomenon in electrostatically actuated micro-and nano …