Effects of growth temperature for in-situ deposited SiNx interlayer on structural and optical properties of semipolar (112¯ 2) AlGaN films

X Luo, X Zhang, Y Qian, R Fang, B Chen, Y Shen… - Applied Surface …, 2023 - Elsevier
The dependence of surface morphology, crystalline quality, and optical properties on the
growth temperature of in-situ deposited SiN x interlayers in the semipolar (11 2¯ 2) AlGaN …

Self-assembled growth of inclined GaN nanorods on (10− 10) m-plane sapphire using metal–organic chemical vapor deposition

S Chae, K Lee, J Jang, D Min, J Kim, O Nam - Journal of crystal growth, 2015 - Elsevier
We report the self-assembled growth of inclined and highly ordered GaN nanorods on (10−
10) m-plane sapphire by metal–organic chemical vapor deposition, without metal catalyst …

A comparative investigation of the optical properties of polar and semipolar GaN epi-films grown by metalorganic chemical vapor deposition

H Lu, L Wang, Y Liu, S Zhang, Y Yang… - Semiconductor …, 2022 - iopscience.iop.org
We report on the structural and optical properties of polar gallium nitride on c-plane sapphire
substrates and semi-polar (11–22) GaN films on m-plane sapphire substrates by …

Enhanced structural and optical properties of semipolar (11 2¯ 2) AlGaN film with insertion of AlN/AlGaN superlattice

X Luo, X Zhang, R Fang, L Chen, S Xu, J Cui… - Journal of Vacuum …, 2023 - pubs.aip.org
The high-quality semipolar (⁠ 11 2 2⁠) AlGaN films with high Al contents were successfully
deposited on (⁠ 10 1 0⁠) m-plane sapphire substrates with the insertion of AlN/AlGaN …

Annealing effects on polycrystalline GaN using nitrogen and ammonia ambients

A Ariff, N Zainal, Z Hassan - Superlattices and Microstructures, 2016 - Elsevier
This paper describes effects of using post-annealing treatment in different conditions on the
properties of polycrystalline GaN layer grown on m-plane sapphire substrate by electron …

Characterization of M-plane GaN thin films grown on misoriented γ-LiAlO2 (100) substrates

YC Lin, I Lo, YC Wang, CC Yang, CH Hu… - Journal of Crystal …, 2016 - Elsevier
M-plane GaN thin films were grown on 11° misoriented γ-LiAlO 2 substrates without peeling
off or cracking by plasma-assisted molecular beam epitaxy. Because of anisotropic growth …

Novel in situ self-separation of a 2 in. free-standing m-plane GaN wafer from an m-plane sapphire substrate by HCl chemical reaction etching in hydride vapor-phase …

S Woo, S Lee, U Choi, H Lee, M Kim, J Han, O Nam - CrystEngComm, 2016 - pubs.rsc.org
A 2 in.-diameter free-standing m-plane GaN wafer was fabricated through in situ self-
separation using HCl chemical reaction etching (HCRE) in hydride vapor-phase epitaxy …

The property optimization of n-GaN films grown on n-SiC substrates by incorporating a SiNx interlayer

S Cui, Y Zhang, Z Huang, G Deng, B Li, D Zhao… - Journal of Materials …, 2017 - Springer
We presented the epitaxial growth of n-GaN films on n-SiC substrates with n-Al 0.3 Ga 0.7 N
buffer and SiN x interlayer by metal organic vapor phase epitaxy. In order to optimize the …

Influence of in-situ deposited SiNx interlayer on crystal quality of GaN epitaxial films

T Fan, W Jia, G Tong, G Zhai, T Li, H Dong… - Superlattices and …, 2018 - Elsevier
GaN epitaxial films with SiN x interlayers were prepared by metal organic chemical vapor
deposition (MOCVD) on c-plane sapphire substrates. The influences of deposition times and …

[PDF][PDF] Optical Characterization of GaN

JAR Romero - 2017 - run.unl.pt
Gallium nitride is a direct bandgap semiconductor commonly used in LED's and lasers. Its
wide bandgap, high thermal conductivity and ability to operate at high frequencies and …