In recent years, Light Detection and Ranging (LiDAR) has been drawing extensive attention
both in academia and industry because of the increasing demand for autonomous vehicles …

This paper presents AlScN piezoelectric two-axis MEMS mirrors with gimbal-less and
gimbaled designs fabricated in a CMOS-compatible manner. Integrated piezoelectric …

Precise imaging in three-dimension (3D) is an essential technique for solid-state light
detection and ranging (LiDAR). Among various solid-state LiDAR technologies, silicon (Si) …

In this research, an omnidirectional scanning micromirror fabricated using a three-
dimensional (3D) printing process and manual assembly is presented. The core part of the …

We present the design optimization, fabrication, and analysis of an electromagnetic biaxial
scanning micromirror with 6.4 mm-diameter. The scanner is composed of a micromirror …

This work presents a biaxial electromagnetically-drivenpiezoresistivelysensed scanning
mirror fabricated in a CMOS (complementary metal oxide semiconductor) process. The …

This paper presents a system-level model of a microsystem architecture deploying
cooperating microactuators. An assembly of a piezoelectric kick-actuator and an …

In this paper, we report an actuator with a magnet made of novel rare earth magnetic powder
Sm-Fe-N with diameter of 2 µm to 5 µm. Micro magnets were fabricated by mixing the …

In this paper, we present an electromagnetically actuated two-axis scanning micromirror with
large aperture and tilting angle for laser pointing applications. The two-axis micromirror with …

In this paper, a simplified dynamic model is constructed to describe the main characteristic of
electromagnetic micro-mirror. Then, based on the information provided by the derived …