Status of silicon carbide (SiC) as a wide-bandgap semiconductor for high-temperature applications: A review

JB Casady, RW Johnson - Solid-State Electronics, 1996 - Elsevier
Silicon carbide (SiC), a material long known with potential for high-temperature, high-power,
high-frequency, and radiation hardened applications, has emerged as the most mature of …

Thin film deposition and microelectronic and optoelectronic device fabrication and characterization in monocrystalline alpha and beta silicon carbide

RF Davis, G Kelner, M Shur, JW Palmour… - Proceedings of the …, 1991 - ieeexplore.ieee.org
The deposition of silicon carbide thin films and the associated technologies of impurity
incorporation, etching, surface chemistry, and electrical contacts for fabrication of solid-state …

[图书][B] Semiconductor materials

LI Berger - 2020 - taylorfrancis.com
Semiconductor Materials presents physico-chemical, electronic, electrical, elastic,
mechanical, magnetic, optical, and other properties of a vast group of elemental, binary, and …

Prospects for device implementation of wide band gap semiconductors

JH Edgar - Journal of materials research, 1992 - cambridge.org
Diamond, silicon carbide, gallium nitride, aluminum nitride, and boron nitride are currently
under development for both electronic and optoelectronic semiconductor devices …

Controlled growth of 3C‐SiC and 6H‐SiC films on low‐tilt‐angle vicinal (0001) 6H‐SiC wafers

JA Powell, JB Petit, JH Edgar, IG Jenkins… - Applied physics …, 1991 - pubs.aip.org
We have found that, with proper pregrowth surface treatment, 6H‐SiC single‐crystal films
can be grown by chemical vapor deposition (CVD) at 1450° C on vicinal (0001) 6H‐SiC with …

High sensitivity ultraviolet radiation detector

JA Edmond, CH Carter Jr - US Patent 5,093,576, 1992 - Google Patents
(57) ABSTRACT A high sensitivity radiation detecting photodiode formed in silicon carbide
comprises a monocrystalline silicon carbide substrate; a first monocrystalline portion of …

Thin films and devices of diamond, silicon carbide and gallium nitride

RF Davis - Physica B: Condensed Matter, 1993 - Elsevier
The extreme properties of diamond, SiC and GaN provide combinations of attributes for high-
power,-temperature,-frequency and optoelectronic applications. The methods of deposition …

Wide bandgap semiconductor materials for high temperature electronics

PR Chalker - Thin Solid Films, 1999 - Elsevier
High temperature electronics is an advancing field aimed at the development of
semiconductor devices designed to function reliably at temperatures in excess of 125° C …

Growth and modulation of silicon carbide nanowires

HJ Choi, HK Seong, JC Lee, YM Sung - Journal of crystal growth, 2004 - Elsevier
We report on the growth and modulation of silicon carbide nanowires (SiC NWs). The NWs
were fabricated by chemical vapor deposition (CVD) process, and had diameters of< 50nm …

Synthesis of β-SiC powder by use of microwave radiation

PD Ramesh, B Vaidhyanathan, M Ganguli… - Journal of Materials …, 1994 - cambridge.org
Monophasic β-SiC powder has been synthesized in a commercial microwave oven
operating at 2450 MHz and power levels up to 980 W. This simple method of solid-state …