This paper reviews some of the main drivers, developments and future requirements in the
field of micromanufacturing as related to the machining process from the perspective of the …

Scanning probe microscopes, in particular the atomic force microscope (AFM), have
developed into sophisticated instruments that, throughout the world, are no longer used just …

The paper addresses the questions of how micro products are designed and how they are
manufactured. Definitions of micro products and micro engineering are discussed and the …

A broad variety of materials can be found in modern machine tool structures ranging from
steel and cast iron to fiber reinforced composite materials. In addition, material combinations …

Dimensional parameters are the most commonly encountered quality characteristics of
workpieces. The measuring process for testing conformance of those characteristics …

The need for dimensional micro and nano metrology is evident, and as critical dimensions
are scaled down and geometrical complexity of objects is increased, the available …

METAS developed a new 3D coordinate measuring machine (CMM) dedicated to traceable
measurement for small parts with nanometre accuracy. The innovative design of the touch …

Nanotechnology is becoming vitally important in many industrial fields, offering significant
wealth creating opportunities and massive improvements to standards of living. This paper …

Quality control in the growing field of microsystems technology (MST) demands much higher
resolution and accuracy of the testing equipment than conventional products. This is …

With the nanopositioning and nanomeasuring machine (NPM-Machine) developed at the
Technische Universität Ilmenau, subnanometre resolution and nanometre uncertainty in a …