Based on the use of a number of spherical samples of single-crystal sapphire, this paper
reports the etch rate characteristics of this material as a function of orientation during …

Compared to other methods, we present the benefits of the Continuous Cellular Automaton
(CCA) to describe in a simple and flexible manner anisotropic wet chemical etching of GaN …

Quartz is widely used in microelectromechanical systems (MEMS). Especially, MEMS quartz
resonators are applied to sensors and serve as sensitive elements. The capability of deep …

The quartz-crystal resonator is the core device for frequency control in modern
communication systems and network technology. At present, in modern resonator blanks …

Based on the utilization of numerous wagon-wheel structures fabricated on Gallium Nitride
(GaN)(0 0 0 1) substrate, this paper reports the characteristics of the wet etching rate …

This paper presents a quartz wet etching simulation procedure tailored for
microelectromechanical systems (MEMS) fabrication. It utilizes geometric methods and is …

Single-crystal quartz material is widely applied in the manufacture of resonators and
sensors, but it is difficult to process because of its high hardness. A novel way to fabricate …

This paper proposes a method for classifying crystal planes based on the bond angle
characteristics of quartzunit cells and constructs an etch rate model for quartzcrystal planes …

Abstract Variable-height, out-of-plane, convoluted microneedle arrays with high aspect ratio,
tapered shafts, sharp tips, and smooth surfaces are required for applications where the …

The occurrence and variation of wet-etched structures on R-plane substrates of sapphire
were analyzed according to the distribution of drilling rates of typical crystal planes. First, the …