This paper gives a brief overview of microactuators, focussing on devices made by
microfabrication technologies which are based on silicon processes like photolithography …

Making submicron interelectrode gaps is the key to reducing the driving voltage of a micro
comb-drive electrostatic actuator. Two new fabrication technologies, oxidation machining …

The authors describe a single-sided bulk silicon dissolved wafer process that has been used
to fabricate several different micromechanical devices. It involves the simultaneous …

Self-assembly of three-dimensional microstructures using the surface tension force of molten
solder to produce out-of-plane rotation is demonstrated. The generic nature of the technique …

Surface micromachined actuators composed of polysilicon, parallelogram flexible supports
are described. The parallelogram actuators transform both the direction and the magnitude …

A micro actuator that is called a distributed electrostatic actuator, because it consists of many
driving units, and that is driven by electrostatic force is described. Each driving unit has …

A process technology is developed for surface micromachining that achieves sub-
micrometer linewidths without the use of advanced lithography equipment. This technique is …

The design of dual axis microengineered comb-drive electrostatic actuators is investigated.
Experimental measurements of diode-isolated bulk micromachined x-ystages with a folded …

Resonant and nonresonant operation of submicron gap, electrostatic, comb-drive actuators
is reported. Using a single-mask process and a 4-mu m-thick phosphorus-doped polysilicon …

A simple bulk-micromachining process for the fabrication of comb-drive electrostatic
actuators in single-crystal silicon is described. A p+ etch-stop layer is first formed by boron …