Activation of implanted Si, Ge, and Sn donors in high-resistivity halide vapor phase epitaxial β-Ga2O3: N with high mobility

JA Spencer, MJ Tadjer, AG Jacobs, MA Mastro… - Applied Physics …, 2022 - pubs.aip.org
Activation of implanted donors into a highly-resistive, nitrogen-doped homoepitaxial β-Ga 2
O 3 has been investigated. Nitrogen acceptors with the concentration of∼ 10 17 cm− 3 were …

Nitrogen-doped β-Ga2O3 vertical transistors with a threshold voltage of≥ 1.3 V and a channel mobility of 100 cm2 V− 1 s− 1

D Wakimoto, CH Lin, QT Thieu… - Applied Physics …, 2023 - iopscience.iop.org
We demonstrate high-performance normally-off multi-fin β-Ga 2 O 3 vertical transistors with a
wide fin width from 1.0 to 2.0 μm by using a nitrogen-doped β-Ga 2 O 3 high-resistive layer …

Experimental determination of critical thickness limitations of (010) β-(AlxGa1− x) 2O3 heteroepitaxial films

JS Lundh, K Huynh, M Liao, W Olsen, K Pan… - Applied Physics …, 2023 - pubs.aip.org
The effect of heteroepitaxial β-(Al x Ga 1− x) 2 O 3 film thickness and Al content on surface
morphology was characterized to experimentally determine the critical thickness limitations …

Computational design of optimal heterostructures for

S Seacat, JL Lyons, H Peelaers - Physical Review Materials, 2024 - APS
Ga 2 O 3 is a wide-band-gap material of interest for a wide variety of devices, many of these
requiring heterostructures, for instance, to achieve carrier confinement. A common method to …

Design and simulation of T‐gate AlN/β‐Ga2O3 HEMT for DC, RF and high‐power nanoelectronics switching applications

R Singh, GP Rao, TR Lenka… - … Journal of Numerical …, 2024 - Wiley Online Library
In this paper, we report DC and RF analysis of a T‐gate AlN/β‐Ga2O3 high electron mobility
transistors (HEMTs) by optimizing the gate‐drain distance (L GD) and two T‐gate …

N2O grown high Al composition nitrogen doped β-(AlGa) 2O3/β-Ga2O3 using MOCVD

F Alema, T Itoh, W Brand, M Tadjer, A Osinsky… - Journal of Vacuum …, 2023 - pubs.aip.org
We report on the MOCVD growth of smooth (010)(Al x Ga 1–x) 2 O 3 and (100)(Al y Ga 1–y)
2 O 3 epitaxial films on β-Ga 2 O 3 substrates with (010) and (100) orientations, respectively …

First-principles study on the structural and electronic properties of β-(AlxGa1-x) 2O3 alloy

CZ Zhao, KY Zheng - Journal of Physics and Chemistry of Solids, 2024 - Elsevier
The generalized gradient approximation plus U parameter method is adopted to study the
structural and electronic properties of β-(Al x Ga 1-x) 2 O 3. The results show that the bond …

Assessment of channel temperature in β-(AlxGa1− x) 2O3/Ga2O3 heterostructure field-effect transistors using visible wavelength thermoreflectance thermal imaging

JS Lundh, G Pavlidis, K Sasaki, A Centrone… - Applied Physics …, 2024 - pubs.aip.org
This work demonstrates direct, rapid 2D thermal mapping measurement capabilities of the
ultrawide bandgap semiconductor channel of lateral β-(Al x Ga 1− x) 2 O 3/Ga 2 O 3 …

Reduced temperature in lateral (AlxGa1− x) 2O3/Ga2O3 heterojunction field effect transistor capped with nanocrystalline diamond

HN Masten, JS Lundh, TI Feygelson, K Sasaki… - Applied Physics …, 2024 - pubs.aip.org
The low thermal conductivity of β-Ga 2 O 3 is a significant concern for maximizing the
potential of this ultra-wide bandgap semiconductor as a power switching device technology …

[HTML][HTML] Electrothermal enhancement of β-(AlxGa1− x) 2O3/Ga2O3 heterostructure field-effect transistors via back-end-of-line sputter-deposited AlN layer

JS Lundh, C Cress, AG Jacobs, Z Cheng… - Journal of Applied …, 2024 - pubs.aip.org
The electrothermal device performance of β-(Al 0.21 Ga 0.79) 2 O 3/Ga 2 O 3 heterostructure
field-effect transistors (HFETs) was enhanced by incorporating a 400 nm thick AlN capping …