This topical review discusses recent development and trends on scanning micromirrors for
biomedical applications. This also includes a biomedical micro robot for precise …

This paper presents in-plane electrostatic comb-drive actuators with stroke as large as 245
μm that is achieved by employing a novel clamped paired double parallelogram (C-DP-DP) …

Presenting state-of-the-art research into the dynamic field of tunable micro-optics, this is the
first book to provide a comprehensive survey covering a varied range of topics including …

Part 1 of this two-part paper describes the analysis and 2D finite element (FE) simulations for
a capacitive incremental position sensor for nanopositioning of microactuator systems with a …

Selecting micro-electromechanical actuators with high force output, broad traveling ranges,
and robust reliability becomes increasingly critical for active optical microsystem devices …

Linear-Stiffness Rotary MEMS Stage Page 1 514 JOURNAL OF
MICROELECTROMECHANICAL SYSTEMS, VOL. 21, NO. 3, JUNE 2012 JMEMS Letters …

Probe-based data storage attracted many researchers from academia and industry, resulting
in unprecendeted high data-density demonstrations. This topical review gives a …

The era of infinite storage seems near. To reach it, data storage capabilities need to grow,
and new storage technologies must be developed. This thesis studies one aspect of one of …

In optics, the first subject concerns the active alignment of components in optical fiber
systems. A solution for reducing the cost of optical component assembly while retaining …

In this paper, an identification scheme is proposed for electrostatically driven scanning micro-
mirror. In this scheme, the first principle model of the micro-scanner is investigated firstly …