Micro‐and nano air vehicles are defined as “extremely small and ultra‐lightweight air
vehicle systems” with a maximum wingspan length of 15 cm and a weight less than 20 …

Over the past few years, microelectromechanical system (MEMS) based on-chip resonators
have shown significant potential for sensing and high frequency signal processing …

An overview of microelectromechanical systems (MEMS) resonators for frequency reference
and timing applications is presented. The progress made in the past few decades in design …

This paper reports experimental results on a new class of single-chip multiple-frequency (up
to 236 MHz) filters that are based on low motional resistance contour-mode aluminum nitride …

This paper demonstrates a new class of AlN-based piezoelectric resonators for operation in
the microwave frequency range. These novel devices are identified as cross-sectional-Lamé …

Capacitive parasitic feedthrough is an impediment that is inherent to all electrically
interfaced micron scale resonant devices, resulting in increased challenges to their …

This review describes recent experimental developments in the study of nonlinearities for
flexural microelectromechanical systems (MEMS) structures. It includes motivation for …

In this paper, the performance of 6.35 MHz Lamé-mode square resonators with different
dimensions of straight-beam anchor supports is presented, with quality factor values …

This paper details a bulk acoustic mode resonator fabricated in single-crystal silicon with a
quality factor of 15 000 in air, and over a million below 10 mTorr at a resonant frequency of …

This paper reports theoretical analysis and experimental results on a numerical electrode
shaping design technique that permits the excitation of arbitrary modes in arbitrary …