Practical DTCO through design/patterning exploration
N Lafferty, J Meiring, M Bahnas… - … Co-optimization for …, 2015 - spiedigitallibrary.org
Design Technology Co-Optimization (DTCO) becomes more important with every new
technology node. Complex patterning issues can no longer wait to be detected …
technology node. Complex patterning issues can no longer wait to be detected …
Design technology co-optimization for 14/10nm metal1 double patterning layer
Y Duan, X Su, Y Chen, Y Su, F Shao… - … Co-optimization for …, 2016 - spiedigitallibrary.org
Design and technology co-optimization (DTCO) can satisfy the needs of the design,
generate robust design rule, and avoid unfriendly patterns at the early stage of design to …
generate robust design rule, and avoid unfriendly patterns at the early stage of design to …