Progress and prospects of III-nitride optoelectronic devices adopting lift-off processes

WY Fu, HW Choi - Journal of Applied Physics, 2022 - pubs.aip.org
Lift-off processes have been developed as the enabling technology to free the epitaxial III-
nitride thin film from a conventional growth substrate such as sapphire and silicon in order to …

III-nitride semiconductor membrane electronics and optoelectronics for heterogeneous integration

R Chen, Y Song, R He, J Wang, J Li, T Wei - Progress in Quantum …, 2024 - Elsevier
The rapidly developing III-nitrides materials and devices technologies are driving the
advancements in hybrid heterogeneous structures for multi-material and multifunctional …

[HTML][HTML] Laser slicing: A thin film lift-off method for GaN-on-GaN technology

V Voronenkov, N Bochkareva, R Gorbunov, A Zubrilov… - Results in Physics, 2019 - Elsevier
A femtosecond laser focused inside bulk GaN was used to slice a thin GaN film with an
epitaxial device structure from a bulk GaN substrate. The demonstrated laser slicing lift-off …

HVPE-GaN grown on MOCVD-GaN/sapphire template and ammonothermal GaN seeds: Comparison of structural, optical, and electrical properties

T Sochacki, Z Bryan, M Amilusik, M Bobea… - Journal of crystal …, 2014 - Elsevier
Crystallization of GaN by the HVPE technique on an MOCVD-GaN/sapphire template with
photo-lithographically patterned Ti mask and ammonothermally-grown GaN crystals (Am …

High nitrogen pressure solution growth of GaN

M Bockowski - Japanese Journal of Applied Physics, 2014 - iopscience.iop.org
Results of GaN growth from gallium solution under high nitrogen pressure are presented.
Basic of the high nitrogen pressure solution (HNPS) growth method is described. A new …

Hydride vapor phase epitaxy for gallium nitride substrate

J Hu, H Wei, S Yang, C Li, H Li, X Liu… - Journal of …, 2019 - iopscience.iop.org
Due to the remarkable growth rate compared to another growth methods for gallium nitride
(GaN) growth, hydride vapor phase epitaxy (HVPE) is now the only method for mass product …

Homoepitaxial HVPE-GaN growth on non-polar and semi-polar seeds

M Amilusik, T Sochacki, B Lucznik, M Fijalkowski… - Journal of crystal …, 2014 - Elsevier
In this work homoepitaxial HVPE-GaN growth on non-polar and semi-polar GaN seeds was
described. Two crystallization processes, in the same experimental conditions but using …

Hydride vapor phase epitaxy for current III–V and nitride semiconductor compound issues

E Gil, Y André, R Cadoret, A Trassoudaine - Handbook of Crystal Growth, 2015 - Elsevier
Hydride vapor phase epitaxy (HVPE) was part of the very first vapor phase epitaxy
processes developed for the growth of III–V semiconductor layers. HVPE's features—the …

Preparation of free-standing GaN substrates from GaN layers crystallized by hydride vapor phase epitaxy on ammonothermal GaN seeds

T Sochacki, M Amilusik, B Lucznik… - Japanese Journal of …, 2014 - iopscience.iop.org
Crystallization of GaN by hydride vapor phase epitaxy (HVPE) on ammonothermally grown
GaN seed crystals is overviewed. Morphology of the crystal growing surface at the beginning …

Hydride Vapor‐Phase Epitaxy Reactor for Bulk GaN Growth

V Voronenkov, N Bochkareva, A Zubrilov… - … status solidi (a), 2020 - Wiley Online Library
An hydride vapor‐phase epitaxy reactor for the growth of bulk GaN crystals with a diameter
of 50 mm is developed. Growth rate nonuniformity of 1% is achieved using an axisymmetric …