Microscale combustion: Technology development and fundamental research
The high energy density of hydrocarbon fuels creates a great opportunity to develop
combustion based micro-power generation systems to meet increasing demands for …
combustion based micro-power generation systems to meet increasing demands for …
A review of microvalves
This review gives a brief overview of microvalves, and focuses on the actuation mechanisms
and their applications. One of the stumbling blocks for successful miniaturization and …
and their applications. One of the stumbling blocks for successful miniaturization and …
[图书][B] Fundamentals and applications of microfluidics
Now in its Third Edition, the Artech House bestseller, Fundamentals and Applications of
Microfluidics, provides engineers and students with the most complete and current coverage …
Microfluidics, provides engineers and students with the most complete and current coverage …
Micropower generation using combustion: Issues and approaches
AC Fernandez-Pello - Proceedings of the combustion institute, 2002 - Elsevier
The push toward the miniaturization of electromechanical devices and the resulting need for
micropower generation (milliwatts to watts) with low-weight, long-life devices has led to the …
micropower generation (milliwatts to watts) with low-weight, long-life devices has led to the …
Triboelectric-piezoelectric-electromagnetic hybrid nanogenerator for high-efficient vibration energy harvesting and self-powered wireless monitoring system
J He, T Wen, S Qian, Z Zhang, Z Tian, J Zhu, J Mu… - Nano energy, 2018 - Elsevier
Energy harvesting is a key technology for the self-powered mode of wireless sensor nods
and mobile terminals. A large number of devices have been developed to convert …
and mobile terminals. A large number of devices have been developed to convert …
Parametric study of inserting internal spiral fins on the micro combustor performance for thermophotovoltaic systems
With the rapid development of MEMS devices, the power system based on micro scale
combustion has drawn great attention. The thermal performance of micro combustion plays …
combustion has drawn great attention. The thermal performance of micro combustion plays …
Wafer-to-wafer bonding for microstructure formation
MA Schmidt - Proceedings of the IEEE, 1998 - ieeexplore.ieee.org
Wafer-to-wafer bonding processes for microstructure fabrication are categorized and
described. These processes have an impact in packaging and structure design. Processes …
described. These processes have an impact in packaging and structure design. Processes …
Advances and challenges in the development of power-generation systems at small scales
DC Walther, J Ahn - Progress in Energy and Combustion Science, 2011 - Elsevier
The miniaturization of electro-mechanical devices, and the resulting need for micro-power
generation (milliwatts to watts) with low weight, long life devices, has lead to the recent …
generation (milliwatts to watts) with low weight, long life devices, has lead to the recent …
Deep reactive ion etching
F Laermer, S Franssila, L Sainiemi, K Kolari - Handbook of silicon based …, 2020 - Elsevier
This chapter discusses reactive ion etching (RIE) and deep RIE (DRIE) on wafers detailing
the various equipment and reactor requirements for different applications. The Bosch …
the various equipment and reactor requirements for different applications. The Bosch …
Microfabrication of 3D silicon MEMS structures using gray-scale lithography and deep reactive ion etching
Micromachining arbitrary 3D silicon structures for micro-electromechanical systems can be
accomplished using gray-scale lithography along with dry anisotropic etching. In this study …
accomplished using gray-scale lithography along with dry anisotropic etching. In this study …