The symmetric MEMS gyroscope is a typical representative of inertial navigation sensors in
recent years. It is different from the traditional mechanical rotor gyroscope in that it …

Micro-electromechanical systems (MEMS) Coriolis vibratory ring gyroscope, which utilizes
Byran effect to detect rotation, is regarded as a two-dimensional derivative of vibrating shell …

This paper describes a procedure for identifying mass and stiffness imperfections present in
a microring gyroscope. In general mass and stiffness imperfections will be present as a …

This paper reports the permanent frequency mismatch reduction of the primary wineglass
modes in a planar axisymmetric resonator by strategic mass loading. The resonator consists …

In this paper, a method employing both parametric excitation and harmonic forcing is
applied to the excitation of a micro-ring gyroscope in order to improve its rate resolution …

This paper introduces a utility algorithm to reduce the permanent frequency mismatch of the
primary wineglass modes in a disk resonator gyroscope via stiffness perturbation. In this …

MEMS gyroscopes play an important role in inertial navigation measurements, which mainly
works in n= 2 mode. However, mode matching is the basis for high-precision detection …

This paper presents a study on dynamics of a dual-mass MEMS vibratory gyroscope in
presence of fabrication imperfections and reports a method for precision electrostatic …

This paper reports a frequency trimming method for a resonator used in a quad-mass
gyroscopes (QMG) by focused ion beam (FIB) etching. The effects of the suspension …

This letter reports, for the first time, on a high-frequency resonant square micro-gyroscope
using piezoelectric transduction. Degenerate pairs of orthogonal flexural resonance modes …