Influence of bias voltage on the microstructure and physical properties of magnetron sputtered Zr–Si–N nanocomposite thin films
CS Sandu, N Cusnir, D Oezer, R Sanjinés… - Surface and Coatings …, 2009 - Elsevier
We report an investigation concerning the influence of ion bombardment on the
nanostructure and physical properties of Zr–Si–N nanocomposite thin films. The films were …
nanostructure and physical properties of Zr–Si–N nanocomposite thin films. The films were …
A unique approach to reveal the nanocomposite nc-MN/SiN-layer architecture of thin films via electrical measurements
CS Sandu, S Harada, R Sanjinés… - Surface and Coatings …, 2010 - Elsevier
By addition of Si to a binary transition metal nitride MN (eg TiN, ZrN, NbN, CrN), the
hardness, thermal stability and chemical inertness of films have been considerably …
hardness, thermal stability and chemical inertness of films have been considerably …
Fabrication of Ta–Si–N/Ag nanocomposite thin films with near-zero temperature coefficient of resistance
H Gao, C Li, F Ma, Z Song, K Xu - Journal of Alloys and Compounds, 2015 - Elsevier
Abstract Ta–Si–N/Ag nanocomposite thin films were prepared by reactive magnetron co-
sputtering of Ta, Si and Ag targets in the plasma of N 2 and Ar. It was found that Ag nano …
sputtering of Ta, Si and Ag targets in the plasma of N 2 and Ar. It was found that Ag nano …