A method including: determining recipe consistencies between one substrate measurement
recipe of a plurality of substrate measurement recipes and each other substrate …

(57) ABSTRACT A defect prediction method for a device manufacturing process involving
production substrates processed by a lithographic apparatus, the method including training …

US PATENT DOCUMENTS 7.587, 704 B2 9, 2009 Ye et al. 2003, OO73013 A1 4/2003 HSu
et al. 2004.0156030 A1 8, 2004 Hansen 2004/O181768 A1 9, 2004 Krukar 2004/0265707 …

BACKGROUND A lithographic projection apparatus can be used, for example, in the
manufacture of integrated circuits (ICs). In Such a case, a patterning device (eg, a mask) …

Methods of identifying a hot spot from a design layout or of predicting whether a pattern in a
design layout is defective, using a machine learning model. An example method disclosed …

(57) ABSTRACT A method of determining a relationship between a stochastic variation of a
characteristic of an aerial image or a resist image and one or more design variables, the …

A method for improving a lithographic process for imaging a portion of a design layout onto a
substrate using a lithographic apparatus, the method including: obtaining a first source of the …

Examples of synchronized parallel tile computation techniques for large area lithography
simulation are disclosed herein for solving tile boundary issues. An exemplary method for …

A method for improving a lithographic process for imaging a portion of a design layout onto a
substrate using a lithographic apparatus, the method including: obtaining a relationship of a …

A method to improve a lithographic process for imaging a portion of a design layout onto a
substrate using a lithographic projection apparatus having an illumination system and …