In the present work, a lithium niobate (LN) 43° Y cut LN film is transferred onto a substrate
with 11 layers of SiO2/Ta2O5 and solidly mounted resonators with a reflector are …

This paper presents a new approach for the design of film bulk acoustic resonators (FBARs)
with high-quality factor Q a at antiresonant frequency f a. Lamb waves are among the main …

Tungsten thin films are used for various applications and sometimes exhibit an A15 structure
(β-W). They have some superior properties in comparison to the bcc structure (α-W), such as …

Lamb wave microresonators with wavelengths λ of 5–8 μm, vibrating in the S0 mode, and
having 75 electrode pairs were fabricated and characterized. The results were compared to …

The bulk acoustic wave resonator with the acoustic Bragg reflector is considered. The
materials for the Bragg reflector layers are chosen. These materials are molybdenum for the …

In this paper, the Q-factor enhancement of the Thin Film Bulk Acoustic Wave Resonator
(FBAR) with Type-II dispersion is investigated. Our purpose is to improve the Q-factors of the …

In this work, a longitudinally excited shear-wave resonator (YBAR) based on single-
crystalline lithium tantalate (LiTaO3, LT) thin film is proposed. The YBAR has a 200 nm X-cut …

Рассмотрены пьезоэлектрические пленки оксида цинка, полученные методом
реактивного магнетронного напыления. Исследовано влияние условий получения …

Abstract Film Bulk Acoustic Resonators (FBARs), also known as Thin Film Bulk Acoustic
Resonators (TFBARs), are one of the key players in the recent ongoing era of 5G …

Thin-film bulk-acoustic-wave (BAW) devices are used for RF selectivity in mobile
communication system and other wireless applications. Currently, the conventional RF filters …