The material dispatching method for conveyor system in 450 mm wafer fabrication

Continuous flow transport scheduling for conveyor-based AMHS in wafer fabs

C Schwenke, K Kabitzsch - 2017 Winter Simulation Conference …, 2017 - ieeexplore.ieee.org
Automated material handling systems (AMHS) can greatly impact the manufacturing
performance of a semiconductor fabricating facility (fab). High traffic loads within an AMHS …
被引用次数：7 相关文章 所有 2 个版本
[PDF] sagepub.com

A dispatching method for the lots of different priorities in 450-mm semiconductor manufacturing

CN Wang, JW Wang, MT Chou… - Advances in …, 2017 - journals.sagepub.com
Semiconductor industry grows rapidly in recent years. It has an impact on the economies all
over the world. For the mass production requirement, the wafer size starts to be increased …
被引用次数：2 相关文章 所有 3 个版本

Lowering Variability in Transport Times by Scheduling Conveyor-Based AMHS in Wafer Fabs

C Schwenke, K Kabitzsch - 2018 IEEE 16th International …, 2018 - ieeexplore.ieee.org
Variability increases cycle times and inventory levels in semiconductor fabricating facilities
(wafer fabs). Variability in wafer fabs originates from many sources such as reentrant …
被引用次数：1 相关文章

Optimization versus construction of transport schedules to reduce travel time variability and avoid congestions in conveyor-based AMHS for wafer fabs

C Schwenke, S Jannasch… - 2018 Winter Simulation …, 2018 - ieeexplore.ieee.org
Advanced transport scheduling for conveyor-based automated material handling systems
(AMHS) in semiconductor fabricating facilities (wafer fabs) can reduce transport times and …
相关文章 所有 2 个版本
[PDF] simulation.su

[PDF][PDF] CONTINUOUS FLOW TRANSPORT SCHEDULING FOR CONVEYOR-BASED AMHS IN WAFER FABS

WKV Chan, A D'Ambrogio, G Zacharewicz, N Mustafee… - simulation.su
Automated material handling systems (AMHS) can greatly impact the manufacturing
performance of a semiconductor fabricating facility (fab). High traffic loads within an AMHS …
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