An introduction to thin film processing using high-power impulse magnetron sputtering

D Lundin, K Sarakinos - Journal of Materials Research, 2012 - cambridge.org
High-power impulse magnetron sputtering (HiPIMS) is a promising sputtering-based ionized
physical vapor deposition technique and is already making its way to industrial applications …

Physics and technology of magnetron sputtering discharges

JT Gudmundsson - Plasma Sources Science and Technology, 2020 - iopscience.iop.org
Magnetron sputtering deposition has become the most widely used technique for deposition
of both metallic and compound thin films and is utilized in numerous industrial applications …

Plasma diagnostics for understanding the plasma–surface interaction in HiPIMS discharges: a review

N Britun, T Minea, S Konstantinidis… - Journal of Physics D …, 2014 - iopscience.iop.org
The physical and chemical aspects of plasma–surface interaction in high-power impulse
magnetron sputtering (HiPIMS) discharges are overviewed. The data obtained by various …

High power impulse magnetron sputtering discharge

JT Gudmundsson, N Brenning, D Lundin… - Journal of Vacuum …, 2012 - pubs.aip.org
The high power impulse magnetron sputtering (HiPIMS) discharge is a recent addition to
plasma based sputtering technology. In HiPIMS, high power is applied to the magnetron …

On the film density using high power impulse magnetron sputtering

M Samuelsson, D Lundin, J Jensen, MA Raadu… - Surface and Coatings …, 2010 - Elsevier
The influence on thin film density using high power impulse magnetron sputtering (HiPIMS)
has been investigated for eight different target materials (Al, Ti, Cr, Cu, Zr, Ag, Ta, and Pt) …

Introduction to magnetron sputtering

JT Gudmundsson, D Lundin - High power impulse magnetron sputtering, 2020 - Elsevier
Plasma-based physical vapor deposition (PVD) methods have found widespread use in
various industrial applications. In plasma-based PVD processes, the deposition species are …

Alpha-vs. beta-W nanocrystalline thin films: A comprehensive study of sputter parameters and resulting materials' properties

FTN Vüllers, R Spolenak - Thin Solid Films, 2015 - Elsevier
Tungsten thin films have exceptional thermal and mechanical properties, compared to other
pure metal coatings, making them indispensable in many contemporary high-tech …

An ionization region model for high-power impulse magnetron sputtering discharges

MA Raadu, I Axnäs, JT Gudmundsson… - Plasma Sources …, 2011 - iopscience.iop.org
A time-dependent plasma discharge model has been developed for the ionization region in
a high-power impulse magnetron sputtering (HiPIMS) discharge. It provides a flexible …

Argon metastables in HiPIMS: time-resolved tunable diode-laser diagnostics

C Vitelaru, D Lundin, GD Stancu… - Plasma Sources …, 2012 - iopscience.iop.org
Time-resolved tunable diode-laser absorption spectroscopy measurements were performed
on the argon metastable (Ar m) level 3s 2 3p 5$(^{2}{\rm P}^{\circ} _ {3/2}) $ 4s excited at …

Characterization and performance of AlTiN, AlTiCrN, TiN/TiAlN PVD coated carbide tools while turning SS 304

AP Kulkarni, VG Sargade - Materials and Manufacturing Processes, 2015 - Taylor & Francis
This study presents the physical, mechanical properties and dry turning performance of
AlTiN, AlTiCrN, and TiN/TiAlN coatings produced on K-grade tungsten carbide insert by …