MEMS-based oscillators are an emerging class of highly miniaturized, batch manufacturable
timing devices that can rival the electrical performance of well-established quartz-based …

Wafer level packaging plays many important roles for MEMS (micro electro mechanical
systems), including cost, yield and reliability. MEMS structures on silicon chips are …

An overview of microelectromechanical systems (MEMS) resonators for frequency reference
and timing applications is presented. The progress made in the past few decades in design …

The temperature dependence of the quality factor of microelectromechanical system
(MEMS) resonators is analyzed and measured. For silicon MEMS resonators, there are …

Micro-electromechanical systems (MEMS) Coriolis vibratory ring gyroscope, which utilizes
Byran effect to detect rotation, is regarded as a two-dimensional derivative of vibrating shell …

Microfabrication technologies initially developed for integrated electronics have been
successfully applied to batch-fabricate a wide variety of micromechanical structures for …

Resonators fabricated in heavily doped silicon have been noted to have a reduced
frequency-temperature dependence compared with lightly doped silicon. The resonant …

Utilizing silicon and silicon dioxide's opposing temperature coefficients of Young's modulus,
composite resonators with zero linear temperature coefficient of frequency are fabricated …

As a high-precision angular rate sensor, the Frequency-Modulated (FM) gyroscope based
on MEMS craft has attracted more and more attention in recent years, owing to its …

After two decades of intensive development, 3-D integration has proven invaluable for
allowing integrated circuits to adhere to Moore's Law without needing to continuously shrink …