This paper presents a micro-scale air flow sensor based on a free-standing cantilever
structure. In the fabrication process, MEMS techniques are used to deposit a silicon nitride …

The internal thermoelectromechanical transduction loop in micromechanical resonant
structures has been studied in this work and utilized to electronically enhance their quality …

US PATENT DOCUMENTS FOREIGN PATENT DOCUMENTS 6,223,601 B1* 5/2001
Harada et al.................... T3/649 WO WO 98/37635 A1 8, 1998 6,249,073 B1 6/2001 Nguyen …

Microbridge and cantilever electrostatic actuators are fabricated using thin film technology
and surface micromachining at low temperatures 100 C on glass substrates. Electrostatic …

This paper presents construction and performance of a novel hybrid microelectromechanical
system (MEMS) vortex flowmeter. A miniature cantilever MEMS displacement sensor was …

6,831,531 6,859,113 6,861,914 6,894,576 6,909,221 6,930,569 6,943,484 6,954,020
6,966,224 6,995,622 7,005,946 7,211,926 7.215, 061 7,248,128 7,274,002 7,352.608 …

Driving a microcantilever externally may not be desirable in many sensor applications.
Alternatively, it is possible to extract full spectral characteristics of the anharmonic thermal …

In recent years, highly sensitive and selective as well as cost-effective sensing and detection
of biomolecules (eg virus, bacterial, DNA and protein) by MEMS/NEMS (Micro-/Nano Electro …

To support the large growth in wireless devices, such as personal data assistants (PDAs),
wireless local area network (WLAN) enabled laptop computers, and intelligent transportation …

Microcantilevers as one of the most fundamental forms of MEMS devices have found
extensive applications in various fields including sensors during the last decade. Simple …