Ultra-short pulse lasers for microfabrication: a review

G Račiukaitis - IEEE Journal of Selected Topics in Quantum …, 2021 - ieeexplore.ieee.org
Ultra-short pulse lasers, generating coherent light pulses with pulse durations in the
picosecond and femtosecond range, are becoming popular in precision laser …

Needle beams: a review

R Grunwald, M Bock - Advances in Physics: X, 2020 - Taylor & Francis
Needle beams are highly attractive for applications which take advantage from a spatial and
temporal localization of photons. High intensities, high resolution and extended depth of …

Super-stealth dicing of transparent solids with nanometric precision

ZZ Li, H Fan, L Wang, X Zhang, XJ Zhao, YH Yu… - Nature …, 2024 - nature.com
Laser cutting of semiconductor wafers and transparent dielectrics has become a dominant
process in manufacturing industries, encompassing a wide range of applications from …

Facilitated glass separation by asymmetric Bessel-like beams

M Jenne, D Flamm, K Chen, M Schäfer, M Kumkar… - Optics express, 2020 - opg.optica.org
The modification of transparent materials is enabled by focused ultrashort laser pulses.
Single pass processing up to several millimeters can be achieved by the usage of elongated …

[HTML][HTML] Nanoscale confinement of energy deposition in glass by double ultrafast Bessel pulses

J del Hoyo, R Meyer, L Furfaro, F Courvoisier - Nanophotonics, 2021 - degruyter.com
Ultrafast laser pulses spatially shaped as Bessel beams in dielectrics create high aspect
ratio plasma channels whose relaxation can lead to the formation of nanochannels. We …

In-depth comparison of conventional glass cutting technologies with laser-based methods by volumetric scribing using Bessel beam and rear-side machining

J Dudutis, J Pipiras, R Stonys, E Daknys… - Optics …, 2020 - opg.optica.org
With the development of industrial lasers and novel glass processing techniques, which offer
high speed, quality and precision, this becomes an attractive alternative to conventional …

Non-diffraction-length Bessel-beam femtosecond laser drilling of high-aspect-ratio microholes in PMMA

H Wang, F Zhang, K Ding - Optik, 2021 - Elsevier
Bessel beam femtosecond lasers being non-diffractive are well-suited for drilling high aspect
ratio microholes with minor thermal impact. Hereby, the Bessel beams with different non …

[HTML][HTML] High aspect ratio structuring of glass with ultrafast Bessel beams

C Vetter, R Giust, L Furfaro, C Billet, L Froehly… - Materials, 2021 - mdpi.com
Controlling the formation of high aspect ratio void channels inside glass is important for
applications like the high-speed dicing of glass. Here, we investigate void formation using …

[HTML][HTML] Low bend loss femtosecond laser written waveguides exploiting integrated microcrack

T Lee, Q Sun, M Beresna, G Brambilla - Scientific Reports, 2021 - nature.com
We introduce the fabrication and use of microcracks embedded in glass as an optical
element for manipulating light propagation, in particular for enhancing waveguide …

An optical needle with elongated transversal profile created using Airy beams for laser processing of glasses

P Šlevas, K Mundrys, O Ulčinas, S Orlov - Optics & Laser Technology, 2024 - Elsevier
In recent decades, significant progress has been made in the field of laser beam shaping,
driven by the growing demands in both scientific research and industrial applications …