Coating layer on samples with roughness: numerical study for coherent Fourier scatterometry
D Kolenov, SF Pereira - Modeling Aspects in Optical Metrology …, 2023 - spiedigitallibrary.org
For the development of integrated circuits, the accompanying metrology inside the
fabrication process is essential. Non-imaging metrology of nanostructure has to be quick …
fabrication process is essential. Non-imaging metrology of nanostructure has to be quick …