Atomic layer deposition (ALD) is a vapor-phase deposition technique that has attracted
increasing attention from both experimentalists and theoreticians in the last few decades …

Zero-emission eco-friendly vehicles with partly or fully electric powertrains have exhibited
rapidly increased demand for reducing the emissions of air pollutants and improving the …

This paper presents a single-pole 32-throw (SP32T) switch with an operating frequency of
up to 6 GHz for 5G communication applications. Compared to the traditional SP32T module …

A novel channel mobility model with two-dimensional (2D) aspect is presented covering the
effects of source/drain voltage (VDS) and gate voltage (VGS), and incorporating the drift and …

A Cylindrical resonator gyroscope is a type of vibratory gyroscope with a core element of a
symmetrical cylindrical shell resonator. Compared with hemispherical resonators, cylindrical …

A CMOS MEMS lateral electrothermal switch with flexural metal-metal contact is
demonstrated by using metal atomic-layer-deposition (ALD) sidewall patterning. The …

Atomic layer deposition (ALD) is a vapor phase technique to deposit thin films on various
substrates through sequential and self-limiting surface reactions. ALD consists of alternating …

This paper reports the design, fabrication, and characterization of the Fin Phase Change
Nanoelectromechanical Relay (FinPCNR), a truly nanoscale switch. We harness the …

In the trend of Internet of Things (IoT), technologies that integrate CMOS (complementary
metal-oxide-semiconductor) electronics with MEMS (microelectromechanical systems) …

We present design, fabrication and experimental characterization of a multichannel Smart
Slit Assembly for next generation spectrometers, based on an array of 40 variable optical …