Piezoelectric MEMS sensors: state-of-the-art and perspectives

S Tadigadapa, K Mateti - Measurement Science and technology, 2009 - iopscience.iop.org
Over the past two decades, several advances have been made in micromachined sensors
and actuators. As the field of microelectromechanical systems (MEMS) has advanced, a …

Recent progress on flexible nanogenerators toward self‐powered systems

Y Liu, L Wang, L Zhao, X Yu, Y Zi - InfoMat, 2020 - Wiley Online Library
The advances in wearable/flexible electronics have triggered tremendous demands for
flexible power sources, where flexible nanogenerators, capable of converting mechanical …

Ferroelectric‐gated two‐dimensional‐material‐based electron devices

C Zhou, Y Chai - Advanced Electronic Materials, 2017 - Wiley Online Library
Two‐dimensional (2D) materials have the potential to extend state‐of‐the‐art semiconductor
technology to sub‐nanometer scales and have inspired numerous research efforts exploring …

Structural, ferroelectric and optical properties of PZT thin films

SK Pandey, AR James, R Raman, SN Chatterjee… - Physica B: Condensed …, 2005 - Elsevier
We report on the structural, ferroelectric and optical properties of lead zirconate titanate
(PZT) thin films (with a molar ratio of Zr: Ti:: 65: 35) deposited by sol–gel technique on ITO …

Solution-Processed Pb(Zr,Ti)O3 Thin Films with Strong Remnant Pockels Coefficient

E Picavet, K De Geest, E Lievens… - … Applied Materials & …, 2024 - ACS Publications
In contrast to the widely studied electrical properties of Pb (Zr, Ti) O3 thin films, which have
led to their applicability in various application areas such as thin film capacitors …

Enhanced energy storage density in Sc3+ substituted Pb (Zr0. 53Ti0. 47) O3 nanoscale films by pulse laser deposition technique

MK Bhattarai, KK Mishra, AA Instan, BP Bastakoti… - Applied Surface …, 2019 - Elsevier
Abstract Highly oriented Pb (Zr 0.53 Ti 0.47) 0.90 Sc 0.10 O 3 (PZTS) thin films were
deposited on La 0.67 Sr 0.33 MnO 3 (LSMO) buffer layer coated on MgO (100) substrates by …

Performance of magnetoelectric PZT/Ni multiferroic system for energy harvesting application

R Gupta, M Tomar, A Kumar… - Smart Materials and …, 2017 - iopscience.iop.org
Magnetoelectric (ME) coefficient of Lead Zirconium Titanate (PZT) thin films has been
probed for possible energy harvesting applications. Single phase PZT thin films have been …

High performance LaNiO3-buffered,(001)-oriented PZT piezoelectric films integrated on (111) Si

Y Wang, J Ouyang, H Cheng, Y Shi… - Applied Physics …, 2022 - pubs.aip.org
Integration of high-performance lead zirconate titanate (PZT) piezoelectric films onto (111) Si
substrates is beneficial for the development of piezoelectric micro-electro-mechanical …

Photonic sintering of aerosol jet printed lead zirconate titanate (PZT) thick films

J Ouyang, D Cormier, SA Williams… - Journal of the …, 2016 - Wiley Online Library
Lead Zirconate Titanate (PZT) is a commonly used piezoelectric material due to its high
piezoelectric response. We demonstrate a new method of printing and sintering micro‐scale …

Effect of Zr/Ti ratio on the microstructure and ferroelectric properties of lead zirconate titanate thin films

P Khaenamkaew, S Muensit, IK Bdikin… - Materials Chemistry and …, 2007 - Elsevier
Lead zirconate titanate (PZT) thin films with Zr/Ti ratios of 30/70, 40/60, 52/48, 60/40, and
70/30 derived from metal alkoxide precursor solution were deposited on platinized silicon …