[HTML][HTML] Piezoelectric aluminum nitride thin-films: A review of wet and dry etching techniques
Aluminum nitride (AlN) is a technologically relevant material that can be deposited at low
temperatures in the form of thin-films while preserving most of its physical properties …
temperatures in the form of thin-films while preserving most of its physical properties …
Growth and applications of group III-nitrides
O Ambacher - Journal of physics D: Applied physics, 1998 - iopscience.iop.org
Recent research results pertaining to InN, GaN and AlN are reviewed, focusing on the
different growth techniques of Group III-nitride crystals and epitaxial films, heterostructures …
different growth techniques of Group III-nitride crystals and epitaxial films, heterostructures …
Co-designing electronics with microfluidics for more sustainable cooling
Thermal management is one of the main challenges for the future of electronics,,,–. With the
ever-increasing rate of data generation and communication, as well as the constant push to …
ever-increasing rate of data generation and communication, as well as the constant push to …
GaN: Processing, defects, and devices
SJ Pearton, JC Zolper, RJ Shul, F Ren - Journal of applied physics, 1999 - pubs.aip.org
The role of extended and point defects, and key impurities such as C, O, and H, on the
electrical and optical properties of GaN is reviewed. Recent progress in the development of …
electrical and optical properties of GaN is reviewed. Recent progress in the development of …
Wet etching of GaN, AlN, and SiC: a review
D Zhuang, JH Edgar - Materials Science and Engineering: R: Reports, 2005 - Elsevier
The wet etching of GaN, AlN, and SiC is reviewed including conventional etching in
aqueous solutions, electrochemical etching in electrolytes and defect-selective chemical …
aqueous solutions, electrochemical etching in electrolytes and defect-selective chemical …
Group III nitride semiconductors for short wavelength light-emitting devices
JW Orton, CT Foxon - Reports on progress in physics, 1998 - iopscience.iop.org
The group III nitrides (AlN, GaN and InN) represent an important trio of semiconductors
because of their direct band gaps which span the range 1.95-6.2 eV, including the whole of …
because of their direct band gaps which span the range 1.95-6.2 eV, including the whole of …
Epitaxial aluminum scandium nitride super high frequency acoustic resonators
This paper demonstrates super high frequency (SHF) Lamb and surface acoustic wave
resonators based on single-crystal orientation Aluminum Scandium Nitride (AlScN) thin films …
resonators based on single-crystal orientation Aluminum Scandium Nitride (AlScN) thin films …
Room‐temperature photoenhanced wet etching of GaN
MS Minsky, M White, EL Hu - Applied Physics Letters, 1996 - pubs.aip.org
Laser-enhanced, room-temperature wet etching of GaN using either dilute HCl: H2O 1: 10 or
45% KOH: H2O1: 3 is reported. Etch rates of a few hundred Å/min HCl and up to a few …
45% KOH: H2O1: 3 is reported. Etch rates of a few hundred Å/min HCl and up to a few …
Crystallographic wet chemical etching of GaN
DA Stocker, EF Schubert, JM Redwing - Applied Physics Letters, 1998 - pubs.aip.org
We demonstrate well-controlled crystallographic etching of wurtzite GaN grown on c-plane
sapphire using H 3 PO 4, molten KOH, KOH dissolved in ethylene glycol, and NaOH …
sapphire using H 3 PO 4, molten KOH, KOH dissolved in ethylene glycol, and NaOH …
GaN nanotip pyramids formed by anisotropic etching
We experimentally demonstrate the formation of GaN nanotip pyramids by selective and
anisotropic etching of N-polar GaN in KOH solution. For samples grown with adjacent Ga …
anisotropic etching of N-polar GaN in KOH solution. For samples grown with adjacent Ga …