Three-dimensional memory device having select gate electrode that is thicker than word lines and method of making thereof

K Shigemura, J Ariyoshi, M Tsutsumi, M Sano… - US Patent …, 2018 - Google Patents
A three-dimensional memory device includes an alternating stack of insulating layers and
electrically conductive layers located over a substrate, the alternating stack having a …

Semiconductor device

T Kim, KS Seol, H Back, JS Lim, SS Cho - US Patent 9,553,101, 2017 - Google Patents
(57) ABSTRACT A semiconductor device may include gate structures spaced apart above a
top surface of a Substrate. The gate structures may include a horizontal electrode extending …

Three-dimensional memory device having a multilevel drain select gate electrode and method of making thereof

Y Zhang, J Liu, RS Makala, M Chowdhury… - US Patent …, 2018 - Google Patents
A three-dimensional memory device includes an alternating stack of insulating layers and
electrically conductive layers located over a substrate and memory stack structures …

Set of stepped surfaces formation for a multilevel interconnect structure

N Hironaga - US Patent 9,502,429, 2016 - Google Patents
A trench can be formed through a stack of alternating plurality of first material layers and
second material layers. A dielectric material liner and a trench fill material portion can be …

Set of stepped surfaces formation for a multilevel interconnect structure

S Shimabukuro, H Iuchi, M Sano… - US Patent 9,728,499, 2017 - Google Patents
H01L23/522—Arrangements for conducting electric current within the device in operation
from one component to another, ie interconnections, eg wires, lead frames including …

Three-dimensional semiconductor device

SH Lee, S Yun, CS Lee, SS Cho… - US Patent …, 2019 - Google Patents
(57) ABSTRACT A three-dimensional (3D) semiconductor device includes a stack structure
including first and second stacks stacked on a substrate. Each of the first and second stacks …

Wiring structures for three-dimensional semiconductor devices

JG Yun, HS Kim, HS Cho - US Patent 9,165,611, 2015 - Google Patents
BACKGROUND Recently, three-dimensional semiconductor devices have been developed
to manufacture highly integrated devices. Since three-dimensional semiconductor devices …

Methods of forming semiconductor device structures including stair step structures

M Park, AL Olson, J Yu - US Patent 10,453,748, 2019 - Google Patents
A method of forming a semiconductor device assembly comprises forming tiers comprising
conductive structures and insulating structures in a stacked arrangement over a substrate …

Semiconductor devices including word line interconnecting structures

J Park, Y Park, LEE Jaeduk - US Patent 9,337,207, 2016 - Google Patents
A semiconductor memory device includes a substrate including a cell region and an
interconnection region, adjacent first and second rows of vertical channels extending …

Semiconductor device and method of manufacturing the same

NJ Lee - US Patent 9,577,085, 2017 - Google Patents
A semiconductor device may include interlayer insulating layers stacked in a first direction
and separated from each other, word lines formed between the interlayer insulating layers …