Brittle materials are widely used for producing important components in the industry of
optics, optoelectronics, and semiconductors. Ultraprecision machining of brittle materials …

The need for using alternative processes rather than electro-discharge machining (EDM) for
micro-parts has allowed micro-manufacturing (also known as precision engineering) to …

Gallium nitride single crystal (GaN) is difficult to achieve high-efficiency and low-damage
machining due to anisotropy, high hardness and brittleness. Nanoscratch tests of GaN …

Innovative techniques have been proposed to overcome the challenge of the strong
tendency of brittle materials to crack during machining. One of them is the use of an epoxy …

In traditional approach of silicon optical lens production, grinding, lapping, and polishing are
employed. Success of these steps depends on the quality of the preceding ones; therefore …

Micro machining processes are characterized by the influence of size effects like the
influence of the workpiece micro structure on the process and ultimately on the process …

Surface integrity of parts can seriously be damaged by mechanical and thermal loads during
machining leading to crack initiation, constraining of parts or damage. At present, it is very …

The development of ultrahigh-quality-factor (Q) microresonators has been driving such
technologies as cavity quantum electrodynamics (QED), high-precision sensing …

Functional micro/nano structures are promising for enhancing the performance of CaF 2-
based devices. However, it is still a challenge to precisely manufacture CaF 2 micro/nano …

Brittle crystalline materials have important applications in optics and optoelectronics.
However, their powders are highly toxic; thus, the chips generated in material removal …