Polymer microfabrication technologies for microfluidic systems

H Becker, C Gärtner - Analytical and bioanalytical chemistry, 2008 - Springer
Polymers have assumed the leading role as substrate materials for microfluidic devices in
recent years. They offer a broad range of material parameters as well as material and …

Optimized SU-8 processing for low-cost microstructures fabrication without cleanroom facilities

VC Pinto, PJ Sousa, VF Cardoso, G Minas - Micromachines, 2014 - mdpi.com
The study and optimization of epoxy-based negative photoresist (SU-8) microstructures
through a low-cost process and without the need for cleanroom facility is presented in this …

An all SU-8 microfluidic chip with built-in 3D fine microstructures

H Sato, H Matsumura, S Keino… - … of Micromechanics and …, 2006 - iopscience.iop.org
This paper describes the fabrication method of an all SU-8 microfluidic device with built-in
3D fine micromesh structures. 3D micromesh structures were seamlessly integrated into the …

Portable Lab-on-PCB platform for autonomous micromixing

C Aracil, F Perdigones, JM Moreno, A Luque… - Microelectronic …, 2015 - Elsevier
In this paper, an SU-8 portable microfluidic platform consisting on an on-chip impulsion
system implemented for micromixing is reported. The use of pressurized air chambers and …

The electrical conduction and dielectric strength of SU-8

J Melai, C Salm, S Smits, J Visschers… - … of Micromechanics and …, 2009 - iopscience.iop.org
This paper presents a study on the dielectric behavior of SU-8 photoresist. We present
measurements on the leakage current levels through SU-8 layers of varying thickness. The …

[HTML][HTML] Effect of ultrasound on mass transfer during electrodeposition for electrodes separated by a narrow gap

S Coleman, S Roy - Chemical engineering science, 2014 - Elsevier
This work reports an investigation on mass transfer by ultrasound agitation during
electrodeposition on electrodes separated by a narrow inter-electrode gap. Polarisation …

Performance of SU-8 microchips as separation devices and comparison with glass microchips

T Sikanen, L Heikkilä, S Tuomikoski, RA Ketola… - Analytical …, 2007 - ACS Publications
Effective analytical performance of native, all-SU-8 separation microdevices is addressed by
comparing their performance to commercial glass microdevices in microchip zone …

Photolithography system with liquid crystal display as active gray-tone mask for 3D structuring of photoresist

T Hayashi, T Shibata, T Kawashima, E Makino… - Sensors and actuators A …, 2008 - Elsevier
Layer manufacturing is generally utilized for the development of micro electromechanical
systems (MEMS) and micro total analysis systems (μTAS). However, the preparation of …

Highly integrable pressurized microvalve for portable SU-8 microfluidic platforms

F Perdigones, C Aracil, JM Moreno… - Journal of …, 2013 - ieeexplore.ieee.org
In this paper, a highly integrable pressurized thermo-pneumatic microvalve for impulsion
and handling of fluids in portable SU-8 microfluidic platforms is reported. The microvalve …

Flexible fabrication of three-dimensional multi-layered microstructures using a scanning laser system

H Yu, B Li, X Zhang - Sensors and Actuators A: Physical, 2006 - Elsevier
In this paper, we developed a scanning laser system, which allows rapid processing of
freeform multi-layered microstructures. More importantly it enables rapid prototyping of three …