Frequency perturbation integral for piezoelectric quartz crystal microbalances based on scalar differential equations

J Yang - arXiv preprint arXiv:2305.09894, 2023 - arxiv.org
We study frequency shifts in a piezoelectric quartz resonator induced by a surface mass
layer for sensor applications. The scalar differential equations for thickness-shear modes in …

Scalar Differential Equations of Thin Film Bulk Acoustic Wave Resonators with Surface Acoustic Impedance for Sensor Application

H He, J Yang, JA Kosinski - arXiv preprint arXiv:2011.03251, 2020 - arxiv.org
We generalize the two-dimensional scalar differential equations for the thickness-
extensional operating modes of thin film bulk acoustic wave resonators (FBARs) to include …